Axis 850 Manuale Utente Scaricare il pdf (Pagina 9)

Technical Data

Model M-850.11 M-850.50 Units

Active axes X, Y, Z, θ

, θ

X, Y, Z, θ

, θ

Motion and positioning

*Travel range X, Y ±50 ±50 mm

*Travel range Z ±25 ±25 mm

*Travel range θ

, θ

±15 ±15 °

*Travel range θ

±30 ±30 °

Actuator drive DC-motor DC-motor

Integrated sensor Rotary encoder Rotary encoder

Sensor resolution 2048 2048 cts./rev.

Actuator design resolution 0.005 0.05 μm

**Min. incremental motion X, Y, Z 1 (XY), 0.5 (Z) 1 (XY), 0.5 (Z) μm

(6-axis move!)

**Min. incremental motion θ

, θ

55 μrad

(6-axis move!)

Repeatability X, Y ±2 ±2 μm

Repeatability Z ±1 ±1 μm

Repeatability θ

, θ

±10 ±10 μrad

Max. velocity X, Y, Z 0.5 8 mm/s

Max. velocity θ

, θ

6 100 mrad/s

Typ. velocity X, Y, Z 0.3 5 mm/s

Typ. velocity θ

, θ

3 50 mrad/s

Mechanical properties

Stiffness (k

)33N/μm

Stiffness (k

) 100 100 N/μm

Max. load 250 / 50 50 / 20 kg

(baseplate horizontal/any orientation)

Max. holding force 2000 / 500 250 / 85 N

(baseplate horizontal/any orientation)

Resonant frequency*** F

90 90 Hz

Resonant frequency*** F

500 500 Hz

Miscellaneous

Operating temperature range -10 to +50 -10 to +50 °C

Material Aluminum Aluminum

Mass 17 17 kg

Controller

Controller included M-850.502 M-850.502

Operating voltage 100–240 VAC, 50/60 Hz 100–240 VAC, 50/60 Hz

Technical data are specified at 20 ±3 °C. Data for vacuum versions may differ.

*The max. travel of the several

coordinates (X, Y, Z, θ

, θ

) are interdependent. The data for each axis in this table shows its maximum

HexControl™ software showing

scan of a fiber optics component

M-850 Hexapod. Dimensions in mm

Custom water-resistant

Hexapod

travel, where all other axes are at their

zero positions. If the other linear or rota-

tional coordinates are not zero, the avail-

able travel may be less.

**Six-axis move. No moving cables (unlike

serial-kinematic stacked

systems) to introduce bending forces,

torque and friction which degrade posi-

tioning accuracy.

Example: The following position is in the

workspace:

X: +20 mm θ

: +10°

Y: + 20 mm θ

:+10°

Z: +5 mm θ

:-2°

***Baseplate mounted horizontally with

10 kg load

Custom “6+3” Hexapod with

additional struts providing

independent position feedback

The M-850 was replaced by the H-850, see above

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Axis 850 Manuale Utente Pagina 9

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